The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 06, 2006
Filed:
Dec. 31, 2003
Applicants:
Brian Wilk, Portland, OR (US);
Frank Joyce, Portland, OR (US);
Douglas Kreager, Portland, OR (US);
Thomas A. Repko, Dallas, OR (US);
Inventors:
Brian Wilk, Portland, OR (US);
Frank Joyce, Portland, OR (US);
Douglas Kreager, Portland, OR (US);
Thomas A. Repko, Dallas, OR (US);
Assignee:
Intel Corporation, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B25B 27/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor wafer may be secured to a wafer support system by causing a supported surface of the semiconductor wafer to be at a lower gas pressure than an exposed surface of the semiconductor wafer.