The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Feb. 05, 2001
Applicants:
Tristan Richard Holtam, Sussex, GB;
Richard Cooke, Worthing, GB;
Peter Edwards, Sussex, GB;
Geoffrey D. Paffett, Hampshire, GB;
Lionel Marmie, Aussonne, FR;
Inventors:
Tristan Richard Holtam, Sussex, GB;
Richard Cooke, Worthing, GB;
Peter Edwards, Sussex, GB;
Geoffrey D. Paffett, Hampshire, GB;
Lionel Marmie, Aussonne, FR;
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B 11/14 (2006.01);
U.S. Cl.
CPC ...
Abstract
A gripper for loading wafers onto an implant wheel W and removing them from the wheel. The gripper having a substrate engaging mechanism () for engaging the substrate and a means for rotating this substrate engaging mechanism, such that wafers can be removed from the implant wheel, rotated to a second orientation and replaced without leaving the process chamber.