The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 2006
Filed:
Dec. 01, 2004
Applicants:
Hong Shih, Walnut, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Catherine Zhou, Fremont, CA (US);
Bruno Morel, Santa Clara, CA (US);
Brian Mcmillin, Fremont, CA (US);
Paul Mulgrew, Mountain View, CA (US);
Armen Avoyan, Glendale, CA (US);
Inventors:
Hong Shih, Walnut, CA (US);
Tuochuan Huang, Saratoga, CA (US);
Catherine Zhou, Fremont, CA (US);
Bruno Morel, Santa Clara, CA (US);
Brian McMillin, Fremont, CA (US);
Paul Mulgrew, Mountain View, CA (US);
Armen Avoyan, Glendale, CA (US);
Assignee:
Lam Research Corporation, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 6/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A non-destructive and simple method for cleaning a new or used electrostatic chuck comprises a wet cleaning process, which removes contaminants deposited on a surface of the electrostatic chuck.