The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Dec. 05, 2003
Masayuki Tomoyasu, Yamanashi, JP;
Masayuki Tomoyasu, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A process control system that controls processing executed on semiconductor wafers by processing apparatusesinstalled in each bay (area)inside a factory the processing results of which are predictable, having installed in the corresponding bay, at least one measuring apparatusthat executes a measuring operation on workpieces undergoing the processing in the bay, a transfer pathof a transfer apparatus, through which the workpieces are transferred among various apparatuses installed within the bay including the individual processing apparatuses and the measuring apparatus and a process control devicethat controls the processing apparatuses, the measuring apparatus and the transfer apparatus in the bay. This structure reduces the length of time (cycle time) to elapse from the processing through the inspection operation and also improves the operating rate of each processing apparatus.