The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Jun. 24, 2003
Andrew Eric Carlson, Higganum, CT (US);
Andrew Eric Carlson, Higganum, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
An interferometer that includes a first beam-splitting surface positioned to separate an input beam into a first beam and a second beam. A first set of optics is positioned to receive the first beam, direct it to contact a first reflector multiple times and produce a first intermediate beam. The first intermediate beam follows a nominal output path when the first reflector has a first alignment normal to the first beam prior to reflection by the first reflector. The first set of optics includes a second beam-splitting surface, a third beam-splitting surface, and a first fold optic that are positioned to reduce displacement of the first intermediate beam from the nominal output path when the first reflector has an alignment different from the first alignment.