The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Mar. 20, 2002
Applicant:
Yukimasa Saito, Shiroyama-Machi, JP;
Inventor:
Yukimasa Saito, Shiroyama-Machi, JP;
Assignee:
Tokyo Electron Limited, Tokyo-To, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
F23J 17/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
Exhaust pressure in an exhaust systemthat evacuates a processing furnaceis determined as absolute pressure by using a differential manometerwhich measures the exhaust pressure as differential pressure, and a barometer, which measures atmospheric pressure as absolute pressure. An opening of a pressure regulating valveis adjusted based on the absolute exhaust pressure thus determined so that pressure in the processing furnaceis regulated.