The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 2006
Filed:
Apr. 17, 2002
Isao Fukuda, Kameoka, JP;
Shuji Akiyama, Nirasaki, JP;
Isao Fukuda, Kameoka, JP;
Shuji Akiyama, Nirasaki, JP;
Murata Kikai Kabushiki Kaisha, Kyoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
Improvement of the workability in an automatic guided vehicle which carries and transfers a semiconductor wafer between stations in a semiconductor manufacturing plant etc. An automatic guided vehicleis moved to an objective station after storing a waferin a buffer cassette with a transfer equipmentthe waferin a cassetteis transferred to a positioning deviceby taking it up with the transfer equipmentan ID information of the waferis read by a OCRafter truing up the position and direction of the waferby the positioning devicethe waferwhose ID information is read is retained with a transfer handanother waferplaced on the station then is removed by the other transfer handthe waferwhose ID information is read is transferred to the station in the predetermined position and direction and the ID information is controlled to transmit to the station.