The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Apr. 25, 2003
Yasuo Kousaka, Atsugi, JP;
Mutsuko Endou, Atsugi, JP;
Seiichi Inagaki, Atsugi, JP;
Takazou Hirose, Atsugi, JP;
Motonori Yanagi, Atsugi, JP;
Yasuo Kousaka, Atsugi, JP;
Mutsuko Endou, Atsugi, JP;
Seiichi Inagaki, Atsugi, JP;
Takazou Hirose, Atsugi, JP;
Motonori Yanagi, Atsugi, JP;
Nomura Micro Science Co., Ltd., Atsugi, JP;
Abstract
A novel measuring method which allows measurement of fine particles which are extremely fine and contained in a very small amount in ultrapure water is provided. The number frequency with respect to the fine particles having a particle diameter of 0.1 μm or more is measured based on the finding that the fine particles contained in the ultrapure water at the use point of an ultrapure water production system exhibits a logarithmic normal distribution to determine the logarithmic normal distribution of the fine particles contained in the ultrapure water, and the number of the fine particles having a particle diameter of less than those of the measured particles contained in the ultrapure water is obtained from the distribution.