The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Oct. 10, 2003
Stephen E. Hilliker, Tualatin, OR (US);
Anthony E. Sebastian, Livermore, CA (US);
Yan Rubin, Fremont, CA (US);
George Thomas, Fremont, CA (US);
Stephen E. Hilliker, Tualatin, OR (US);
Anthony E. Sebastian, Livermore, CA (US);
Yan Rubin, Fremont, CA (US);
George Thomas, Fremont, CA (US);
Novellus Systems, Inc., San Jose, CA (US);
Abstract
In one embodiment, a system for delivering radio frequency (RF) power to a plasma processing system includes an automatic impedance matching network configured to receive RF power from an RF generator, and a fixed impedance matching network coupled between the automatic impedance matching network and the plasma processing chamber. The fixed impedance matching network may be configured to transform a first impedance presented by the chamber to a second impedance that allows the automatic impedance matching network to operate within a tuning range.