The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Sep. 11, 2003
Keith Frank Best, Prunedale, CA (US);
Joseph Consolini, Costa Mesa, CA (US);
Alexander Friz, San Jose, CA (US);
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
Keith Frank Best, Prunedale, CA (US);
Joseph Consolini, Costa Mesa, CA (US);
Alexander Friz, San Jose, CA (US);
Henricus Wilhelmus Maria Van Buel, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
While the alignment beam is focused on a mark on the substrate table, the substrate table is moved substantially perpendicularly to the alignment beam. If the image of the mark moves relative to a reference mark, then the substrate and the alignment beam are not perpendicular. The mark on the substrate table is aligned to a plurality of reference marks. At least two substrate marks are then aligned with a single reference mark. Errors due to the inclination of the alignment beam are eliminated from the expansion and rotation values calculated for the substrate.