The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Oct. 24, 2002
Dean Jennings, San Ramon, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Brian Haas, San Jose, CA (US);
Ajit Balakrishna, Sunnyvale, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Mark Yam, Monte Sereno, CA (US);
Dean Jennings, San Ramon, CA (US);
Joseph M. Ranish, San Jose, CA (US);
Brian Haas, San Jose, CA (US);
Ajit Balakrishna, Sunnyvale, CA (US);
Sundar Ramamurthy, Fremont, CA (US);
Aaron Hunter, Santa Cruz, CA (US);
Mark Yam, Monte Sereno, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
In a system for thermal processing of a semiconductor substrate, a reflector plate has a stepped surface facing the substrate during heating and cooling of the substrate. The raised surface of the reflector plate has reduced reflectivity, providing advantages during, among other things, cooling of the substrate. The reflector plate also includes a number of recesses to which one or more pyrometers are coupled. These recesses have a highly reflective surface, providing advantages in the performance of the pyrometers.