The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 2006
Filed:
Mar. 26, 2002
Applicants:
Hiroshi Kudo, Kawasaki, JP;
Masanobu Ikeda, Kawasaki, JP;
Kenichi Watanabe, Kawasaki, JP;
Yoshiyuki Ohkura, Kawasaki, JP;
Inventors:
Hiroshi Kudo, Kawasaki, JP;
Masanobu Ikeda, Kawasaki, JP;
Kenichi Watanabe, Kawasaki, JP;
Yoshiyuki Ohkura, Kawasaki, JP;
Assignee:
Fujitsu Limited, Kawasaki, JP;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
A semiconductor device includes a multilayer interconnection structure including an organic interlayer insulation film in which a conductor pattern is formed by a damascene process, wherein the organic interlayer insulation film carries thereon an organic spin-on-glass film.