The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Oct. 17, 2002
Chun-cheng Tsao, Cupertino, CA (US);
Theodore R. Lundquist, Dublin, CA (US);
William Thompson, Los Altos, CA (US);
Erwan Le Roy, San Jose, CA (US);
Eugene A. Delenia, Morgan Hill, CA (US);
Chun-Cheng Tsao, Cupertino, CA (US);
Theodore R. Lundquist, Dublin, CA (US);
William Thompson, Los Altos, CA (US);
Erwan Le Roy, San Jose, CA (US);
Eugene A. Delenia, Morgan Hill, CA (US);
Credence Systems Corporation, Milpitas, CA (US);
Abstract
Methods and apparatus for integrated circuit diagnosis, characterization or modification using a focused ion beam. A method for editing an integrated circuit includes acquiring an image of structures of an integrated circuit by applying a focused ion beam to an outer surface of the integrated circuit to visualize structures beneath the outer surface of the integrated circuit. The method includes using the image to find a location of a circuit element in the integrated circuit and then performing one or more editing operations on the circuit element by applying a focused ion beam to the location found.