The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2006

Filed:

Nov. 05, 2003
Applicant:

Boris Yokhin, Nazareth Illit, IL;

Inventor:

Boris Yokhin, Nazareth Illit, IL;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01N 23/201 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for inspection of a sample includes irradiating the sample with a polychromatic beam of X-rays, comprising X-ray photons having a range of respective photon energies. The X-rays scattered from the sample are received at a plurality of scattering angles using one or more sensors, which generate output signals indicative of the respective photon energies of the X-rays photons that are incident thereon. The output signals are analyzed based on the photon energies so as to determine a scattering profile of the sample at a selected photon energy within the range.


Find Patent Forward Citations

Loading…