The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jun. 21, 2001
Frank Melzer, Utzmemmingen, DE;
Ulrich Bingel, Lauterburg, DE;
Frank Melzer, Utzmemmingen, DE;
Ulrich Bingel, Lauterburg, DE;
Carl Zeiss Smt AG, Oberkochen, DE;
Abstract
In a method of connecting a multiplicity of optical elements () to a basic body (), in particular for producing a faceted mirror (), for example for beam mixing and field imaging for an EUV lighting system, the individual optical elements () are positioned on the basic body () and subsequently connected to one another by an galvanoplastic process. Alternatively, the multiplicity of optical elements are aligned on an auxiliary structure () and the optical elements () are subsequently made to grow up galvanoplastically on their rear sides, forming a supporting structure () as the basic body.