The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 2006

Filed:

Jul. 11, 2001
Applicants:

Asher Klatchko, Portland, OR (US);

Samuel C. Howells, Portland, OR (US);

Michael A. Ward, Portland, OR (US);

Inventors:

Asher Klatchko, Portland, OR (US);

Samuel C. Howells, Portland, OR (US);

Michael A. Ward, Portland, OR (US);

Assignee:

Applied Materials, Inc., Santa Clara, CA (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H04N 1/40 (2006.01); H04N 1/405 (2006.01); G06K 15/00 (2006.01);
U.S. Cl.
CPC ...
Abstract

An algorithm (method) for sizing (adjusting edges) grayscale or dose level pixel-maps (raster images) real time for input into radiant beam lithography systems or similar dose level grayscale image rendering systems to compensate for systemic distortions such as edge bias and/or loss of linearity (i) successively assembles one or more frame matrixes of grayscale values from a parent pixel-map having edges and corners where an edge is defined by gray pixels having values between 1, 2, . . . n, or by pixels having at least one black (0-gray or dose level) neighbor; (ii) slides a sub-matrix window within each frame matrix, to find, calculate and store values for gradients perpendicular to the edges, and any corner within each frame matrix; (iii) loops over pixels within such sub-matrix window at each position within the frame matrix to adjust the grayscale value of each edge pixel found; and (iii) propagates a grayscale correction value to pixels inward or outward per the computed perpendicular gradient to establish a new edge position within each frame matrix, and where there is more than one frame matrix , (iv) reassembles the frame matrixes, thereby, generating a daughter grayscale or dose level pixel-map which upon projection and recording compensates for systemic distortions.


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