The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Mar. 05, 2003
Igor Petrov, Holon, IL;
Zvika Rosenberg, Mevasseret Zion, IL;
Pavel Adamec, Haar, DE;
Igor Krayvitz, Rehovot, IL;
Igor Petrov, Holon, IL;
Zvika Rosenberg, Mevasseret Zion, IL;
Pavel Adamec, Haar, DE;
Igor Krayvitz, Rehovot, IL;
Applied Materials, Israel, Ltd., Rehovot, IL;
Abstract
A method and apparatus for use in monitoring a sample with a charged particle beam are presented. A mechanical displacement between a plane defined by the sample's surface and an optical axis defined by a beam directing arrangement is provided so as to orient the sample at a certain non-right anglewith respect to the optical axis. A primary charged particle beam propagating towards the sample is deflected so as to affect the trajectory of the primary charged particle beam to provide a certain non-zero anglebetween the primary beam propagation axis and said optical axis.