The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jan. 25, 2005
Applicants:
Allen S. Yu, Fremont, CA (US);
James Pan, Santa Clara, CA (US);
Inventors:
Allen S. Yu, Fremont, CA (US);
James Pan, Santa Clara, CA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/3205 (2006.01); H01L 21/4763 (2006.01);
U.S. Cl.
CPC ...
Abstract
For fabricating dual gate structures of complementary transistors, a gate material is deposited into an opening disposed over a P-well and an N-well having the complementary transistors formed therein. An ion species is implanted into a portion of the gate material to form a first gate structure over one of the P-well or the N-well. The gate material remains to form a second gate structure over the other one of the P-well or the N-well. A thermal anneal is performed such that the ion species and the gate material react within the first gate structure.