The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
May. 20, 2004
Philippe Delpech, Meylan, FR;
Christophe Regnier, St. Hilaire du Touvet, FR;
Sebastien Cremer, Grenoble, FR;
Philippe Delpech, Meylan, FR;
Christophe Regnier, St. Hilaire du Touvet, FR;
Sebastien Cremer, Grenoble, FR;
STMicroelectronics SA, Montrouge, FR;
Abstract
A process for producing an integrated electronic circuit that includes a capacitor comprises the formation of a stack on top of a substrate (). The stack comprises a first volume of a temporary material, a second volume () of at least one insulating dielectric and a third volume () of a first electrically conducting material. After a coating material () has been deposited on the stack, the temporary material is removed via access shafts (C, C) that are formed between a surface (S) of the circuit and the first volume. The temporary material is then replaced with a second, electrically conducting material.