The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 2006
Filed:
Jan. 24, 2005
Puneet Gupta, St. Louis, MO (US);
Larry W. Shive, St. Charles, MO (US);
Brian L. Gilmore, O'Fallon, MO (US);
Puneet Gupta, St. Louis, MO (US);
Larry W. Shive, St. Charles, MO (US);
Brian L. Gilmore, O'Fallon, MO (US);
MEMC Electronic Materials, Inc., St. Peters, MO (US);
Abstract
A wafer boat for use in heat treatment of semiconductor wafers in a vertical furnace comprises support rods extending generally vertically when the wafer boat is placed in the vertical furnace. Fingers are supported by and extend along vertical extent of the support rods. Wafer holder platforms are adapted to be supported by groups of fingers lying in generally different common horizontal planes. The fingers are adapted to underlie the wafer holder platforms and support the platforms at the support locations. The fingers and wafer holder platforms each have a respective first overall maximum thickness. The support location of at least one of the fingers and the wafer holder platforms have a second maximum thickness less than the first overall maximum thickness.