The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Sep. 26, 2003
Applicants:
Kun-pi Cheng, Bei chiu, TW;
Hsin-yuan Chen, Tainan, TW;
Yo-nien Lin, Tainan, TW;
Feng-cheng Chung, Taipei, TW;
Inventors:
Kun-Pi Cheng, Bei chiu, TW;
Hsin-Yuan Chen, Tainan, TW;
Yo-Nien Lin, Tainan, TW;
Feng-Cheng Chung, Taipei, TW;
Assignee:
Taiwan Semiconductor Manufacturing Co. Ltd., Hsin-Chu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 19/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
An automatic method to maintain and correct overlay in the fabrication of integrated circuits is described. An overlay control table is automatically generated for lots run through a process tool. An overlay correction is calculated from the overlay control table and sent to the process tool for real-time or manual overlay correction.