The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 2006
Filed:
Apr. 24, 2003
Applicant:
Andrew Eric Carlson, Higganum, CT (US);
Inventor:
Andrew Eric Carlson, Higganum, CT (US);
Assignee:
Zygo Corporation, Middlefield, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B 11/02 (2006.01);
U.S. Cl.
CPC ...
Abstract
An interferometer for receiving a measurement beam from a target location on a stage of a semiconductor lithography machine and a reference beam from a reference location separated from the target location by a separation distance. The interferometer has a reference path to be traversed by the reference beam within the interferometer and a measurement path to be traversed by the measurement beam within the interferometer. Both the measurement path and the reference path are at least as long as the separation distance between the reference location and the target location.