The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Sep. 17, 2001
Applicants:
Kenneth Alan Goldberg, Berkeley, CA (US);
Patrick P. Naulleau, Oakland, CA (US);
Inventors:
Kenneth Alan Goldberg, Berkeley, CA (US);
Patrick P. Naulleau, Oakland, CA (US);
Assignee:
EUV LLC, Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/00 (2006.01); G02B 5/18 (2006.01); G03F 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A wavefront modulating optical element device employs two or more materials lithographically patterned with programmed thickness profiles. The spatially-varying thickness profiles are chosen to yield arbitrary relative phase-shift and attenuation upon transmission. The device can be designed to create arbitrary diffractive optical elements with specific applications including diffusers, arbitrary holographic optical elements, null-elements for wavefront compensation and control in interferometry.