The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 11, 2006
Filed:
Oct. 09, 2003
Hiromi Chaya, Kyoto, JP;
Takahisa Hayashi, Kyoto, JP;
Shigekazu Komatsu, Yamanashi, JP;
Dainippon Screen Mfg. Co., Ltd., Kyoto, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
A probe mark reading device for reading probe marks stormed on electrode pads of semiconductor chips contained in a semiconductor wafer (), comprising a CCD camera () for taking an image of the semiconductor wafer () and outputting the image as an image signal Si, an optical unit () for optically enlarging a location to be photographed by the CCD camera (), a light source () for illuminating the location to be photographed by the CCD camera () with a flash of light generated for a short period of time from when a flash signal Sf is provided, an X-Y stage () capable of changing a position to be photographed by the CCD camera () based on a motor control signal Sm by moving a mounted semiconductor wafer () in an X-direction and a Y-direction, and a computer () for providing control and saving the images after receiving and trimming the image signal Si. With the above configuration, it is possible to read probe marks in a short time without a user having to expend much time or effort.