The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 04, 2006
Filed:
Jan. 13, 2003
Derryl D. J. Allman, Camas, WA (US);
Charles E. May, Gresham, OR (US);
Derryl D. J. Allman, Camas, WA (US);
Charles E. May, Gresham, OR (US);
LSI Logic Corporation, Milpitas, CA (US);
Abstract
A bonding pad for an integrated circuit, where the bonding pad overlies a fragile dielectric layer. A lower metal layer stack overlies the fragile dielectric layer, and a hard dielectric layer overlies the lower metal layer stack. An upper metal layer stack overlies the hard dielectric layer, where the upper metal layer stack forms voids extending into the upper metal layer stack from an exposed upper surface of the upper metal layer stack. The voids define deformable protrusions in the upper surface of the upper metal layer stack, for at least partially absorbing forces applied to the bonding pad during a bonding operation. Electrically conductive vias extend from the lower metal layer stack through the hard dielectric layer to the upper metal layer stack, and electrically connect the lower metal layer stack to the upper metal layer stack.