The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Apr. 04, 2002
Gerhard Hoppen, Wetzlar, DE;
Gerhard Hoppen, Wetzlar, DE;
Leica Microsystems Semiconductor GmbH, Wetzlar, DE;
Abstract
An inspection microscope () having a light source () that emits light of a first wavelength below 400 nm for illumination of a specimen () to be inspected, and having an objective () that is composed of multiple optical components and has a numerical aperture and a focal length, and having a tube optical system () and an autofocus device () that directs light of a second wavelength onto the specimen (), is disclosed. The inspection microscope () is characterized by the objective (), which has an optical correction that eliminates the longitudinal chromatic aberrations with respect to the first and the second wavelength and whose optical components are assembled in cement-free fashion, the second wavelength being greater than 400 nm.