The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 28, 2006
Filed:
Feb. 09, 2004
Applicants:
Thierry Barge, Grenoble, FR;
Walter Schwarzenbach, Saint-Nazaire-les-Eymes, FR;
Jean-marc Waechter, Saint-Vincent-de-Mercuze, FR;
Thuan Truong, Doméne, FR;
Bruno Ghyselen, Seyssinet-Pariset, FR;
Inventors:
Thierry Barge, Grenoble, FR;
Walter Schwarzenbach, Saint-Nazaire-les-Eymes, FR;
Jean-Marc Waechter, Saint-Vincent-de-Mercuze, FR;
Thuan Truong, Doméne, FR;
Bruno Ghyselen, Seyssinet-Pariset, FR;
Assignee:
S.O.I.Tec Silicon on Insulator Technologies S.A., Bernin, FR;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B28D 1/32 (2006.01);
U.S. Cl.
CPC ...
Abstract
The invention provides an apparatus for splitting a substrate apart, the substrate comprising two adjoining wafers defining between them a cleavage plane, the apparatus being characterized in that it comprises: