The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Jan. 13, 2004
Petrus Marinus Christianus Maria Van Der Biggelaar, Nuenen, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Johannes Heintze, Eindhoven, NL;
Tim Tso, Eindhoven, NL;
Petrus Marinus Christianus Maria Van Der Biggelaar, Nuenen, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Johannes Heintze, Eindhoven, NL;
Tim Tso, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus capable of reducing sensitivity to fluctuating scanning speed and improve lithographic scanning processing time, is presented herein. In one embodiment, the apparatus comprises a modulator that modulates a patterned lithographic beam based on the scanning speed as the beam and substrate move relative to each other. The modulator is configured to modulate an attribute of a patterned lithographic beam, such as, the intensity or size of the beam.