The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Aug. 21, 2003
Aaron Frank, Murphy, TX (US);
David Gonzalez, Plano, TX (US);
John Degenova, Garland, TX (US);
Srinavas Raghavan, Plano, TX (US);
Deepak A. Ramappa, Dallas, TX (US);
Aaron Frank, Murphy, TX (US);
David Gonzalez, Plano, TX (US);
John DeGenova, Garland, TX (US);
Srinavas Raghavan, Plano, TX (US);
Deepak A. Ramappa, Dallas, TX (US);
Texas Instruments Incorporated, Dallas, TX (US);
Abstract
The present invention provides a system for removing organic contaminants () from a copper seed layer that has been deposited on a semiconductor substrate (). The present invention provides a housing () to enclose the semiconductor substrate within. An ultraviolet radiation source () is disposed within the housing. A treatment medium () is also provided within the housing. The semiconductor substrate is enclosed within the housing and exposed to the treatment medium. The ultraviolet radiation source exposes the semiconductor substrate to ultraviolet radiation, desorbing the contaminants from the seed layer.