The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Feb. 11, 2004
Ken Doering, San Jose, CA (US);
Mike Kubani, San Jose, CA (US);
Gi Kim, San Jose, CA (US);
David Foote, San Jose, CA (US);
Ken Doering, San Jose, CA (US);
Mike Kubani, San Jose, CA (US);
Gi Kim, San Jose, CA (US);
David Foote, San Jose, CA (US);
Genus, Inc., Sunnyvale, CA (US);
Abstract
A heater assembly for an ALD or CVD reactor provides protection for an electrical conductor associated with a heating element by using a purge gas to isolate the conductor from the corrosive environment of the reactor chamber. The purge gas is introduced into a sleeve surrounding the conductor and from there is allowed to leak into the reactor chamber to be pumped out with the process gasses. This arrangement avoids the need for airtight seals at the junction of the sleeve and the heating element easing manufacturing requirements and potentially reducing component costs.