The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
May. 27, 2004
Mathias Krause, Dresden, DE;
Christoph Ludwig, Langebrück, DE;
Jens-uwe Sachse, Dresden, DE;
Joachim Deppe, Dresden, DE;
Ralf Richter, Kunzell, DE;
Christoph Kleint, Dresden, DE;
Ricardo Mikalo, Waltersdorf, DE;
Mathias Krause, Dresden, DE;
Christoph Ludwig, Langebrück, DE;
Jens-Uwe Sachse, Dresden, DE;
Joachim Deppe, Dresden, DE;
Ralf Richter, Kunzell, DE;
Christoph Kleint, Dresden, DE;
Ricardo Mikalo, Waltersdorf, DE;
Infineon Technologies AG, Munich, DE;
Abstract
Electrically conductive material is introduced into interspaces between the word lines () and is partially removed using a mask () in such a way that residual portions () of the conductive material in each case fill a section of the relevant interspace and produce an electrical contact with source/drain regions (). With further portions of the conductive material, it is possible to form alignment marks for the fabrication process.