The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 21, 2006
Filed:
Mar. 05, 2003
James V. Tietz, Fremont, CA (US);
Shijian LI, San Jose, CA (US);
Manoocher Birang, Los Gatos, CA (US);
John M. White, Hayward, CA (US);
Sandra L. Rosenberg, Legal Representative, San Jose, CA (US);
Marty Scales, San Jose, CA (US);
Ramin Emami, San Jose, CA (US);
James V. Tietz, Fremont, CA (US);
Shijian Li, San Jose, CA (US);
Manoocher Birang, Los Gatos, CA (US);
John M. White, Hayward, CA (US);
Sandra L. Rosenberg, legal representative, San Jose, CA (US);
Marty Scales, San Jose, CA (US);
Ramin Emami, San Jose, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
A method and apparatus for using fixed abrasive polishing pads that contain posts for chemical mechanical polishing (CMP). The posts have different shapes, different sizes, different heights, different materials, different distribution of abrasive particles and different process chemicals. This invention also includes preconditioning fixed abrasive articles comprising a plurality of posts so that the posts have equal heights above the backing to achieve a uniform texture. This invention relates to improvements with respect to in situ rate measurement (ISRM) devices. The invention resides in providing a mechanical means, such as a notch, to determine when approaching the end of the abrasive web roll. The invention resides in coding the web throughout its length to enable determining the location of different portions of the web. This invention resides in providing perforations in the sides or end of the web for improved handling.