The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Jun. 17, 2003
Peter J. DE Groot, Middletown, CT (US);
Xavier Colonna DE Lega, Middletown, CT (US);
Senthil Balasubramaniam, Rocky Hill, CT (US);
Peter J. De Groot, Middletown, CT (US);
Xavier Colonna De Lega, Middletown, CT (US);
Senthil Balasubramaniam, Rocky Hill, CT (US);
Zygo Corporation, Middlefield, CT (US);
Abstract
In certain aspects, the invention features scanning interferometry systems and methods that can scan an optical measurement surface over distances greater than a depth of focus of imaging optics in the interferometry system, while keeping an optical measurement surface in focus (i.e., maintaining an image of the optical measurement surface coincident with the detector). The optical measurement surface refers to a theoretical test surface in the path of test light in the interferometer that would reflect the test light to produce an optical path length difference (OPD) between it and reference light that is equal to a constant across a detector.