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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 7012438 B1

PDFFull Text
Expired
Date of Patent:
Mar. 14, 2006

Filed:

Jul. 09, 2003

Methods and systems for determining a property of an insulating film

Applicants:

Thomas G. Miller, Sunnyvale, CA (US);

Gregory S. Horner, Santa Clara, CA (US);

Amin Samsavar, San Jose, CA (US);

Zhiwei Xu, Sunnyvale, CA (US);

Patrick Stevens, Norman, OK (US);

Inventors:

Thomas G. Miller, Sunnyvale, CA (US);

Gregory S. Horner, Santa Clara, CA (US);

Amin Samsavar, San Jose, CA (US);

Zhiwei Xu, Sunnyvale, CA (US);

Patrick Stevens, Norman, OK (US);

Assignee:

KLA-Tencor Technologies Corp., Milpitas, CA (US);

Attorneys:

Ann Marie Mewherter

Daffer McDaniel, LLP

Primary Examiner:

Anjan Deb

Int. Cl.
CPC ...
G01R 27/08 (2006.01); G01R 27/26 (2006.01); G01N 27/60 (2006.01);
U.S. Cl.
CPC ...
Abstract

A method for determining a property of an insulating film is provided. The method may include obtaining a charge density measurement of the film, a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and a rate of voltage decay of the film. The method may also include determining the property of the film using the charge density, the surface voltage potential, and the rate of voltage decay. A method for determining a thickness of an insulating film is provided. The method may include depositing a charge on the film, measuring a surface voltage potential of the film relative to a bulk voltage potential of the substrate, and measuring a rate of voltage decay of the film. The method may also include determining a thickness of the film using the rate of voltage decay and a theoretical model relating to leakage and film thickness.

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Miller, Thomas. (2006). Methods and systems for determining a property of an insulating film (U.S. Patent No. 7012438). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/7012438

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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