The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Jun. 04, 2004
Martinus Arnoldus Henricus Terken, Lierop, NL;
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus M H Vosters, Bladel, NL;
Koen J J M Zaal, Eindhoven, NL;
Martinus Arnoldus Henricus Terken, Lierop, NL;
Hernes Jacobs, Eindhoven, NL;
Harmen Klaas Van Der Schoot, Vught, NL;
Petrus M H Vosters, Bladel, NL;
Koen J J M Zaal, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic apparatus is provided. The apparatus includes an illumination system that conditions a beam of radiation, an article support member that supports an article to be placed in a beam path of the beam of radiation on the article support, and a movable carriage for moving the article support member. The carriage includes a compartmented composite structure provided with a non-composite mounting interface and/or cooling interface With such an arrangement, conventional interfacing using, for example metal or ceramic materials, can be applied in combination with the advantages of composite structures, such as a low specific weight, a high Young's modulus at places and directions where required, high strength, high stability, and high electrical resistivity.