The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Apr. 24, 2003
Applicants:
Yuki Shiota, Tokyo, JP;
Osamu Nozawa, Tokyo, JP;
Hideaki Mitsui, Tokyo, JP;
Ryo Ohkubo, Tokyo, JP;
Inventors:
Assignee:
Hoya Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01F 9/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a halftone-type phase-shift mask blank having a phase shifter film, the phase shifter filmhas a phase adjustment layerfor primarily controlling the phase of exposure light, and a transmissivity adjustment layerwhich is formed between a transparent substrateand the phase adjustment layerand primarily controls the transmissivity of exposure light. The transmissivity adjustment layerhas a thickness of 90 angstroms or less.