The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 2006
Filed:
Sep. 24, 2001
Keizo Hirose, Nirasaki, JP;
Kenji Sekiguchi, Nirasaki, JP;
Keizo Hirose, Nirasaki, JP;
Kenji Sekiguchi, Nirasaki, JP;
Tokyo Electron Limited, Tokyo-to, JP;
Abstract
A substrate cleaning tool having little particle sticking to the tool and a substrate cleaning apparatus having the substrate cleaning tool are provided. The substrate cleaning toolhas a plurality of thready brush membersin a bundle. The brush membersare capable of passing cleaning liquid through and ejecting the cleaning liquid through respective surfaces of the members. In operation, the substrate cleaning toolis brought into contact with a substrate W in their relative movement in order to clean the substrate W. As the cleaning liquid is ejected from the surfaces of the brash members, particles are washed away from the surfaces of the brash members. Consequently, it is possible to eliminate a possibility that the particles etc. are transferred to the substrate W.