The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 2006
Filed:
Mar. 28, 2003
Applicants:
Eiji Yonezawa, Aichi, JP;
Tadashi Aoyama, Aichi, JP;
Inventors:
Eiji Yonezawa, Aichi, JP;
Tadashi Aoyama, Aichi, JP;
Assignee:
Nidek Co., Ltd., Aichi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01N 21/86 (2006.01);
U.S. Cl.
CPC ...
Abstract
An inspection apparatus for inspecting a resist boundary on a substrate having an outer surrounding portion, includes: an illumination unit which illuminates the outer surrounding portion of the substrate; a detector which detects light reflected from the outer surrounding portion; and a judgment unit which judges, based on light intensity of the detected reflected light, whether a resist removal width is proper.