The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 28, 2006
Filed:
Oct. 21, 2004
Martijn Houkes, Sittard, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Ramidin Izair Kamidin, Tilburg, NL;
Patricia Vreugdewater, Eindhoven, NL;
Martijn Houkes, Sittard, NL;
Henrikus Herman Marie Cox, Eindhoven, NL;
Ramidin Izair Kamidin, Tilburg, NL;
Patricia Vreugdewater, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A positioning system for moving an object to a target position is presented. In an embodiment, the system includes a first actuator configured to exert a force on the object in a first direction in response to a control current, the actuator having an actuator gain and the generated force being a function of the control current and the actuator gain, the actuator including a magnet configured to induce a magnetic field; and a coil arranged in the magnetic field, the magnet and the coil being movable relative to each other. The system also includes a power supply configured to supply the control current to the actuator in response to a control signal; and a control system configured to control the force generated by the actuator by supplying the control signal to the power supply, the control signal being adapted to the actuator gain, the gain being predetermined as a function of a parameter.