The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Aug. 20, 2003
Applicants:
Shuji Hirao, Osaka, JP;
Takeshi Harada, Shiga, JP;
Kazushi Nii, Osaka, JP;
Takenobu Kishida, Osaka, JP;
Atsushi Ikeda, Niigata, JP;
Kazunori Tsuji, Kyoto, JP;
Inventors:
Shuji Hirao, Osaka, JP;
Takeshi Harada, Shiga, JP;
Kazushi Nii, Osaka, JP;
Takenobu Kishida, Osaka, JP;
Atsushi Ikeda, Niigata, JP;
Kazunori Tsuji, Kyoto, JP;
Assignee:
Matsushita Electric Industrial Co., Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 21/44 (2006.01);
U.S. Cl.
CPC ...
Abstract
After a thin first conductive film is formed on a barrier film having a crystal structure, a second conductive film is formed on the first conductive film. Thereafter, the first conductive film and the second conductive film are heated such that the first and second conductive films are integrated to form a third conductive film.