The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 2006
Filed:
Nov. 29, 2001
Takaaki Hirooka, Yamanashi, JP;
Masao Furuya, Yamanashi, JP;
Takaaki Hirooka, Yamanashi, JP;
Masao Furuya, Yamanashi, JP;
Tokyo Electron Limited, Tokyo, JP;
Abstract
a cooling apparatuscomprises a primary refrigerant circulating circuit which allows a primary refrigerant CWwhose temperature is adjusted by a heat exchangerto circulate through an electrode to adjust a temperature of the electrode, a secondary refrigerant circulating circuit which supplies a secondary refrigerant CWto the heat exchanger to adjust the temperature of the primary refrigerant, and a freezing circuitwhich has a first heat exchangerinterposed in the secondary refrigerant circulating circuit and which adjust a temperature of the secondary refrigerant by a tertiary refrigerant. The temperature of the primary refrigerant is adjusted by the secondary refrigerant without adjusting the temperature using the freezing circuit. When a temperature of the primary refrigerant is set higher than that of the secondary refrigerant, the temperature of the primary refrigerant can be adjusted only by the secondary refrigerant. Only when the temperature of the primary refrigerant is set lower than that of the secondary refrigerant, the temperature of the secondary refrigerant is adjusted by the freezing circuit and thus, it is possible to save energy.