The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Jan. 20, 2004
Paul George Harris, Haverhill, GB;
Paul George Harris, Haverhill, GB;
Leica Microsystems Lithography Ltd., Cambridge, GB;
Abstract
A device for influencing an electron beam, in particular a beam deflector (), comprises a cylindrical support body () with an axial passage () through which the beam can propagate and axially spaced sets of coils () supported by the body and operable by electrical energy to produce electromagnetic fields for deflection of the beam. The device includes a cooling system for counteracting temperature rise in the body () due to operation of the coils (). The system comprises a pipe () of compliant material extending helically around and thermally conductively coupled, preferably adhesively bonded, to the support body () and serving to conduct liquid coolant for heat exchange with the body () over substantially all the external circumferential surface thereof. The cooling system further includes a pump () for conveying the coolant through the pipe () in a generally laminar flow so that, in conjunction with the flow path and pipe material, generation of vibrations is largely avoided and any vibrations that are generated are absorbed by the pipe () rather than transmitted to the body ().