The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
Sep. 24, 2002
Jörn Kamps, Berlin, DE;
Jörn Kamps, Berlin, DE;
JPK Instruments AG, Berlin, DE;
Abstract
The invention relates to a method of and an apparatus for measuring a specimen by means of a scanning probe microscope, especially a scanning force microscope, wherein a probe () is displaced with respect to a specimen () by means of lateral and vertical shifting units () to measure the specimen (); measuring light rays () are generated by means of a light source () and directed to a reflection means () disposed on the probe; the measuring light rays () are reflected at the reflection means (), whereby reflected measuring light rays () are formed; and the reflected measuring light rays () are directed by means of a correction lens () to a detector surface () of a detector means () to generate a measurement signal, the correction lens () being positioned at a distance from the detector surface () substantially corresponding to a focal length of the correction lens ().