The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 14, 2006
Filed:
May. 24, 2002
Applicants:
Kazuyoshi Inoue, Sodegaura, JP;
Shigeo Matsuzaki, Sodegaura, JP;
Inventors:
Kazuyoshi Inoue, Sodegaura, JP;
Shigeo Matsuzaki, Sodegaura, JP;
Assignee:
Idemitsu Kosan Co., Ltd., , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01B 1/08 (2006.01);
U.S. Cl.
CPC ...
Abstract
A sputtering target containing a hexagonal laminar compound formed of indium oxide and zinc oxide and represented by InO(ZnO)wherein m is an integer of 2 to 7 and further contains 0.01 to 1 at % of an oxide of a third element having a normal valence of 4 or more, and a transparent electrically conductive film formed therefrom. The sputtering target has a low volume resistivity and permits stable sputtering. The transparent electrically conductive film is excellent in etchability.