The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Jun. 06, 2000
Applicants:
Karl-heinz Schuster, Königsbronn, DE;
Harry Bauer, Aalen, DE;
Eric Eva, Aalen, DE;
Inventors:
Assignee:
Carl Zeiss SMT AG, Oberkochen, DE;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S 3/13 (2006.01);
U.S. Cl.
CPC ...
Abstract
In a device for reducing the peak power of a pulsed laser light source, in particular for a projection exposure system, there is arranged in the beam path () at least one beam splitter apparatus () by means of which a detour line (or) is produced, via reflecting components (or) for at least one partial beam () with subsequent recombination at a beam recombining element (or) with the other partial beam or beams (or) to form a total beam.