The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Aug. 18, 2003
Applicants:
Mark D. Tracy, Rochester, NY (US);
Jesse N. Klein, West Henrietta, NY (US);
Inventors:
Mark D. Tracy, Rochester, NY (US);
Jesse N. Klein, West Henrietta, NY (US);
Assignee:
MKS Instruments, Inc., Wilmington, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H02P 9/10 (2006.01); H02P 9/44 (2006.01); H02P 9/04 (2006.01); H02P 9/00 (2006.01); H02P 11/00 (2006.01);
U.S. Cl.
CPC ...
Abstract
A fault handling algorithm processes a plurality of fault status signals from a sputtering system in a period of time to generate at least one command signal for affecting the operation of a power generator.