The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Jun. 11, 2003
Petrus Matthijs Henricus Vosters, Bladel, NL;
Hernes Jacobs, Eindhoven, NL;
Mark Van Heumen, Zwijndrecht, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
Petrus Matthijs Henricus Vosters, Bladel, NL;
Hernes Jacobs, Eindhoven, NL;
Mark Van Heumen, Zwijndrecht, NL;
Nicolaas Rudolf Kemper, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A lithographic projection apparatus in which a vacuum chamber provided with a vacuum generator constructed and arranged to generate a vacuum beam path for the projection beam, wherein the apparatus is provided with a collision protection apparatus for reducing the effects of a collision of an object table with the wall of the vacuum chamber or with another object table. These collisions may occur during a power failure or an error in a programmed control logic in a controller of the apparatus.