The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 2006
Filed:
Mar. 10, 2005
Takaaki Hirooka, Yamanashi, JP;
Masao Furuya, Yamanashi, JP;
Shohei Tsutsumi, Osaka, JP;
Tokyo Electron Limited, Tokyo, JP;
Daikin Industries, Ltd., Osaka, JP;
Abstract
The electrode temperature control device in a processing apparatusincludes a freezing circuitcomprising a compressor, a condenser, an expansion valveand an evaporatorwith the evaporator disposed inside a lower electrode. This electrode temperature control device does not require components such as a coolant tank for storing the coolant, a pump for supplying the coolant to the processing apparatus, a heater for adjusting the temperature of the coolant and a heat exchanger for exchanging heat between a primary coolant and a secondary coolant. Thus, the production cost can be lowered, a reduction in installation area through miniaturization of the apparatus is achieved and more efficient use of energy is achieved as well. In addition, by using COas the coolant, the GWP value can be reduced to approximately 1/8000 to 1/7000 that of Freon.