The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 31, 2006
Filed:
May. 20, 2004
Applicants:
Thomas H. Lee, Burlingame, CA (US);
Andrew J. Walker, Mountain View, CA (US);
Christopher J. Petti, Mountain View, CA (US);
Igor G. Kouznetzov, Santa Clara, CA (US);
Inventors:
Thomas H. Lee, Burlingame, CA (US);
Andrew J. Walker, Mountain View, CA (US);
Christopher J. Petti, Mountain View, CA (US);
Igor G. Kouznetzov, Santa Clara, CA (US);
Assignee:
Matrix Semiconductor, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/792 (2006.01); H01L 21/336 (2006.01);
U.S. Cl.
CPC ...
Abstract
There is provided a monolithic three dimensional array of charge storage devices which includes a plurality of device levels, wherein at least one surface between two successive device levels is planarized by chemical mechanical polishing.