The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 6992005 B1

PDF
Full Text
Expired
Date of Patent:
Jan. 31, 2006

Filed:

Apr. 07, 2004
Applicants:

Nobuyuki Ohtsuka, Kawasaki, JP;

Noriyoshi Shimizu, Kawasaki, JP;

Hisaya Sakai, Kawasaki, JP;

Yoshiyuki Nakao, Kawasaki, JP;

Hiroki Kondo, Kawasaki, JP;

Takashi Suzuki, Kawasaki, JP;

Inventors:

Nobuyuki Ohtsuka, Kawasaki, JP;

Noriyoshi Shimizu, Kawasaki, JP;

Hisaya Sakai, Kawasaki, JP;

Yoshiyuki Nakao, Kawasaki, JP;

Hiroki Kondo, Kawasaki, JP;

Takashi Suzuki, Kawasaki, JP;

Assignee:

Fujitsu Limited, Kawasaki, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 29/72 (2006.01);
U.S. Cl.
CPC ...
Abstract

A semiconductor device having a multi-layered wiring structure containing a copper layer, comprises a first insulating film formed over a semiconductor substrate, a first copper pattern buried in the first insulating film, a cap layer formed on the first copper pattern and the first insulating film and made of a substance a portion of which formed on the first copper pattern has a smaller electrical resistance value than a portion formed on the first insulating film, second insulating films formed on the cap layer, and a second copper pattern buried in a hole or a trench, which is formed in the second insulating films on the first copper pattern; and connected electrically to the first copper pattern via the cap layer.


Find Patent Forward Citations

Ohtsuka, Nobuyuki. (2006). Semiconductor device and method of manufacturing the same (U.S. Patent No. 6992005). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/6992005

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